CONTENTS PLAN
Type Cylindrical Coordinates
Model ATS Wafer 3 Axis Standard
Work Range Of Eeach Axis R-Axis
Theta-Axis
Z-Axis
700[mm]
INFINITE
50[mm]
Speed Of Each Axis R-Axis
Theta-Axis
Z-Axis
700/1.0[mm/sec]
150[Degree/sec]
50[mm/sec]
Allowable Load 3 [Kg] (Included Blade)
Cleanliness 0.1 um/cf Class 1
Degree Of Vacuum [Pa] 1.0 x E-6
Repetition ±0.1mm[UNDER]