CONTENTS PLAN
Type Slide Arm Type
Model ATS-RV720R
Work Range Of Each Axis R1-Axis
R2-Axis
Theta-Axis
Z-Axis
3400[mm]
3400[mm]
330 Degree
570[mm]
Speed Of Each Axis R-Axis
Theta-Axis
Z-Axis
3400/4.0[mm/sec]
180/4.0[Degree/sec]
570/4.0[mm/sec]
Allowable Load 17[kg](Included Blade)
Cleanliness Class 100
Degree Of Vacuum [Pa] 1.0 x E-6
Repetition ±0.4mm[UNDER]