Leak Rate(25°C) <1x10(-7)mbar l/s, 30s, He/Air
Air Quality Filtered(5μm), Unoiled Air 3~6 Bar
Differential Pressure On The Gate ≤ 5mbar
Cycles Until First Service ≥ 1million(Unheated And Vacuum, Clean Room)
Opening/Closing Time ≤ 7sec
Operating Temperature
- Seal Plate
- Actuator
- Pneumatic Control Unit

< 120°C
< 60°C
< 50°C
Seal Materials Viton, Customer Option
Body Materials Aluminum / SUS / Etc
Application Gen 4~8